High Speed Deposition of Diamond-like Carbon Film.
نویسندگان
چکیده
منابع مشابه
Effect of bias voltage on structural and mechanical characteristics of diamond-like carbon thin film applied by ion beam deposition
This study, investigates the effect of bias voltage on structural changes of diamond-like carbon thin film created by ion beam deposition is investigated. For this purpose, the bias voltage in the values of 0 V, -50 V, -100 V and -150 V on the AA5083 aluminum alloy was considered. Raman spectroscopy was used to evaluate structural. Influence of the bias voltage on the thickness and roughness of...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1998
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.41.633